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Spinner
System with RccT and automatic substrate pin lift
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easy
to clean multi part process chamber made of HP* material
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Separate
Electronic controller cabinet
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Separate
operator controller with colour touch display
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Start,
Stop and Vacuum on/of functions directly at the process module
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Strong,
direct drive brushless spinner motor
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Turbulence
free process area
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No
photoresFRT splash or dust on the cover plate, assur-ing a
particle-free coating
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Unit
directly on the media arm mounted close to point of use to control
dispense rate.
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Programmable
process parameters (motion and media)
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Unlimited
numbers of recipe (easy more expandable by USB Stick)
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Standard
up to 50 programmable recipe steps
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Recipe
step time: 0.1s -> 999sec (steps 0.1 sec)
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USB
and Ethernet interface for easy data storage and recipe transfer
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Terminal
for EMO external via Bench supply (integrated as option)
