The NXQ4000 Series Mask
Aligner is ideal for universities and pilot line production, supporting
substrate sizes from pieces up to 200 mm and an easy to use interface
with simple, topside mask loading. The NXQ4000 Series Semi-Automatic
Mask Aligner combines innovative design with precision alignment and
exposure features. The automatic sequencing makes the system very easy
to learn and use and is well suited for multi-user labs. The extreme
reliablity, low cost of ownership and versatility of the NXQ4000 has
made it the choice of manufacturing facilities, R&D Centers and
university programs around the world, for a wide range of technologies.
The NXQ8000 Production Mask Aligner
Integrates the latest in Robotic Automation with a state of the art next
generation design from Milara Corporation.
The Dual Arm Robot delivers lightning
fast wafer transfer at twice the accuracy of competitors and
incorporates a pre-aligner from Logosol which can detect transparent
substrates making it ideal for not only silicon, but a wide range of
compound semiconductor materials. It is a WTS combination that is by far
the best in the industry.
The NXQ8000 Alignment Stage utilizes the
latest in linear motion technology. With encoder feedback loops
measuring actual stage position (not motor position), the vision system
is not limited by the hardware, allowing for alignment accuracies of
less than 0.5um 3 sigma. This accuracy is achieved using our Quadcam
Microscope with 5x objectives, delivering an ideal combination of
magnification, field of view and depth of focus.
Gilbert Technologies for more information about Neutronix Quintel products.